LPE 3750 / 4750 SYSTEM DESCRIPTION 1. Process System The process tube, made from GE214 Quartz, is 45 inches in length, and 4 inches inside diameter. It is canter levered on one end and supported by a water-cooled flange with dual "O" rings. A safety vacuum is maintained between these seals. A conden...

Components & Instrumentation These readily available items are either new, have been traded in for other equipment by previous customers, or have been utilized for our own research purposes. Further information such as the quantities, equipment history, status either call or email. Tek-Vac offer...

Tek-Vac will fabricate equipment subassemblies to customer specifictions Viewed here are two process gas distribution systems including mass flow controllers, isolation valves, and stainless steel manifolding. All fittings are metal sealing and all welds are full penetration. <<< RETURN ...

SURPLUS EQUIPMENT & SALE ITEMS Tek-Vac is currently offering our own systems and various components & instrumentation for sale at discounted prices. These readily available systems are either new, have been traded in for other equipment by previous customers, or have been utilized for our ow...

PHOTORESIST CURING SYSTEM Tek-Vac MODEL PRC-2000 A Compact Vacuum Bake Module, Ideal for Processing up to 12" x 12" wafers. Digital temperature control with P.I.D and auto tune features for precision control. Adjustable vacuum chucking pressure. Timed thermal contact provides excellent reproducibili...