COMPETENCIES Process Environment Chambers and Enclosures Process Air Control Modules Mini-Environments (MEBUs) Electro-mechanical , Robotic, and Thermal System Integration Custom... is the leading supplier of process environment control systems for industries requiring precise temperature, humidity, air flow and airborne particulate management. A vertically integrated... technology industries. While industries have come to know Semifab as the leader in mini-environments and process environment control solutions, we are continually adding new products...

Semifab has constantly utilized the expertise of our engineering group to provide original precision air handling solutions to process environment questions for a wide range... operation in the field for decades. Semifab RAM, RAM-E, CD, CD-E, ECU and TECU units are currently providing clean and stable process environments in hundreds of manufacturing facilities... worldwide. Our premier process tool environmental management solution is our Total Environmental Control Unit (TECU) which integrates process tool environment and process cooling...

filtration. For photolithography tools, RAM-E modules create stable, controlled point-of-process environments ensuring maximum resist uniformity. Airflow of up to 4000 cubic feet per...-environments and enclosures. These high performance units provide accurate, controlled airflow and are sized to compensate for potential pressure losses due to auxiliary chemical... minute supports the rigorous requirements of Deep UV processing and is also available with a Low-K option. With this kind of performance and features, Semifab RAM-E modules are today's solution for tomorrow's stringent process requirements. 2010 Semifab Incorporated ...

tool environments as well as repeatable and efficient process cooling water control. Tool airflow from 1500 to 3500 CFM supports the rigorous requirements of most equipment... reduced cost, unified environmental control and floorspace limitations drive the hardware requirements. Semifab TECUs provide precision stability in controlled point-of-process... enclosures while 29 KW of process cooling water keep your system temperatures under control. Designed for addressing broader requirements than earlier generation PACM tools while minimizing...

process stability and controlled point-of-process environments that support photo-resist coat, develop stations and other process modules requiring stringent temperature and humidity...