and Acceleration Acc/Decs XYZ of >2 G s; Speed maximum of 30 m/min. Note: Typical applications use Acc/Dec of ~<=1G . ______Accuracy XYZ 0.6 m to position, ~2 micron along path... (dynamic). ______Resolution XYZ 0.1 m all axes individually. Linear axes have 5 nanometer resolution optical scales. ______Repeatability XYZ 0.3 m to position, ~1 micron along path... (dynamic). Z Z can add 1 micron tool holding variation auto tool change. ______Automatic Tool Changer (# of tools) Fourteen tools per cartridge; With additional cartridges and/or part...

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