Calibration Plate HEBS5 (continued) Diagram 1. Layout of via test pattern in Part III Table I. OD ranges with each row in Part III Row Minimum OD Maximum OD 1 0.223 0.823 2 0.223 1.023 3 0.223 1.223 4 0.223 1.423 5 0.223 1.523 6 0.400 1.400 7 0.532 1.132 8 0.532 1.332 9 0.532 1.532 Table II. OD Valu...

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Calibration Plate I85 (continued) Group5: 6 blaze gratings having periods of 10m, 20m to 60m: Each grating has 4 periods, and has 20 gray levels in each period. D = 0.12 + 0.0526i, where i = 0, 1, 2 . . . . . 19. Group 6: 6 blaze gratings having periods of 50m, 100m, 200m, 300m, 400m, and 500m: Eac...

Calibration Plate I85 P+N Description of the HEBS-Glass Calibration Plate I85 P+N The Calibration Plate I85P+N is a HEBS-glass grayscale photomask having test patterns useful for multiple purposes for both Positive Resist and Negative Resist or Sol Gel applications. The mask pattern is written with ...

Calibration Plate HEBS5 (continued) Part III: The test pattern of Part III represents a wider range of tapered structures and is composed of a 9x9 array of via structures that are 800 microns in length, see Diagram 1. This test pattern has nine optical density ranges that are listed in Table I. Ther...