Sputtering Systems Standard Systems Al2O3 sputter deposition tools for 24/7 Hard Disk Drive Thin Film Head fabrication Fully automated single wafer 602 Series (shown here) Semi...-automated multi-wafer 2480 >300 systems installed worldwide In development, and innovative, precision, hi-rate reactive deposition tool for Al2O3 and other materials Process...

be met with a single sputter source. Complex processing often requires multiple materials deposited sequentially without breaking vacuum, and/or the ability to change source... to substrate distances as well as angle of deposition insitu. MeiVac specializes in understanding customers special needs and customizing single sputter source or multi-sputter source...

substrate bias option to enhance deposited film properties Film thickness uniformities typically <1% sigma/mean Helium Backside Gas Cooling keeps substrates typically <100 C Optimized...

on the process. MeiVac resistance substrate heaters have been used in sputtering, laser ablation, ion beam deposition, ECR, MOCVD, and many other general laboratory heating...

(sputter & evaporation), multi-material optical film R&D deposition system. Innovative altitude simulation system. MeiVac also designs, manufactures and installs system upgrades and refurbishments. 2009-2013 MeiVac, Inc. home | sitemap | contact us| MeiVac Conditions of Sale ...