publications are available. Listed below are some available papers which may be useful for understanding the basics of SAMs (Self Assembled Monolayers) and MVD technology. Please... - iMEMS, 2006 Vacuum-base technology for the deposition of self-assembled monolayers (SAMs) - Russian Vacuum Technology Journal, 2005 Vapor deposition of composite organic...

. In MEMS applications, MVD molecular films are typically self-assembled monolayers (SAMs) with very low work of adhesion and are used as anti-stiction coatings. In Nanoimprint...

Molecular Vapor Deposition (MVD) films and a complimentary process demonstration for customers considering a system purchase. Self Assembled Monolayers (SAMs) and Other Coatings I...