Research and Pilot Production Systems[ Stand Alone Bake ] [ 5000/7000 Series ] Stand Alone Bake and HMDS Vapor Prime ModulesSemi-automatic: Manual load / unload VBS-200Single wafer / substrate, stand-alone HMDS Vapor Prime and Dehydration Bake module. Standard 3-pin lifter mechanism and pneumatic op...

Wafer Processing Equipment Automated "Cluster" Systems- Advanced Volume Production SWP 200 - Random access robotic wafer track systems for processing of 75-200mm wafers. OptiTRAC - Random access robotic wafer track systems for processing of 75-150mm wafers. Automated Track Systems- Advanced Producti...

10000 Series The 10000 Series provides for automatic spin processing, cassette to cassette with two, three or four process stations in single or dual lane configurations. For wafers/substrates up to 200mm diagonal dimensions. PC controlled with SVGA color monitor display. 10000 in "dual lane" conf...

800 and 500 Series Upgrades [ Service ] [ 800 and 5000 Series Upgrades ] [ MultiFab-Targetrack-Omnichuck ] Solitec's traditional 800 and 5000 Series process systems have dozens of upgrade options that adapt to new process needs, increase reliability, and provide additional years of productivity. 8...

The 800 "Solitrac SeriesCartridge Dispense System Solitec pump The S800 & SoliTrac Series provides automatic (cassette to cassette) spin processing for wafers/substrates and irregular shaped substrates of up to 150mm diagonal dimensions. The SoliTrac utilizes a PC microcomputer with flat panel d...