MEMS: Form and roughness measurements The task In the field of MEMS (Micro Electro Mechanical Systems) the transition from development to production is currently taking place. Therefore processes have to more and more be monitored by controlling critical dimensions of MEMS and MOEMS structures. Espe...

Press Releases Solarius Development announces introduction of low-cost solution - October 3, 2003 Solarius Development announces introduction of a new optical profiler - June 2, 2004 Sensofar earns 2004 Photonics Circle of Excellence Award - January 25, 2005 Upcoming events [click on the logo for mo...

Non-Contact Surface Measurement At Solarius Development Inc. (formerly NanoFocus Inc.) our area of expertise is 3D non-contact surface measurement based on laser and optical inspection technologies. Our profilometer product line and confocal microscope meet a wide variety of surface measurement need...

IC Packaging: Process control for semiconductor back-end inspection The task Modern IC Packaging such as Chip Scale Package or Flip-Chip advances into new frontiers, with dimensions that become smaller and smaller. This development presents new challenges for production, as warpage and coplanarity p...

Surface topography analysis with the SolarMap software SolarMap software functions under various platforms (Windows 95, 98, Millenium, NT4 2000 and XP) and is able to read all the major data file formats in the market, it is therefore an ideal complementary analysis tool to almost any data acquisiti...