The Solaris Eclipse is a Benchtop Rapid Thermal Processing system with High Vacuum compatibility. The Eclipse is designed for long process recipes requiring high temperatures for extended periods.Samples up to 150mm in diameter including 6" square can be accomodated. The advanced temperature measure...

The Solaris 100 is a low cost, small footprint Rapid Thermal Processing system designed for research applications and processing samples up to 4" in diameter. The advanced temperature measurement technique and state of the art signal conditioners allow the PID graphical software controller to mainta...

The Solaris 150UV is a standalone unit or an added option for the Solaris 150 RTP System.Applications Include:-Pre Gate Oxidation Cleaning-Pre-Epi Cleaning-Photoresist Descum-Growth of Sacrificial Oxides-Bond Pad Cleaning-Cleaning of Critical Surfaces-Hydrocarbon Removal-High Temperature UV/Ozone De...

The Solaris 150 is a manual loading benchtop RTP system for R&D and pre-production. The Solaris 150 can process up to 150mm substrates at a temperature range from RT-1300 degrees.The unique temperature measurement system of the Solaris requires virtually no calibration for different wafer types ...

SSI-1000 Alpha-Numeric Wafer ID Exposure System The SSI-1000 is an automated or manual loading wafer identification system that can expose up to 20 alpha-numeric characters across the wafer flat or any other location.The SSI-1000 uses a unique 375 nm photo-exposure light engine that is equally effec...