Supervisory Systems Controls & Supervisory Systems Vertical Systems: CX3000 Series (Tube Control) The CX3000 is a tube controller featuring color display and touch panel-type... controller for 300mm vertical systems featuring a 15 color display and touch panel-type operation. Capable of automatically recording data about fluctuations in temperature, gas... and process related information available to the end user than its predecessor CX3000. CX9600 Series (Supervisory System) The CX9600 series of block controllers are mini-computers developed...

) BATCH SYSTEMS QUIXACE 300 MM WAFER SYSTEMS The Batch Thermal Process system offers high throughput by utilizing advanced technologies in such areas as temperature control, wafer... handling automation, reactor purging, and temperature ramping... (more) 200 MM WAFER SYSTEMS VERTRON 200 MM SYSTEM Hitachi Kokusais Thermal Technology featuring: - High-Temp. Oxidation... for SiC wafers - Ultra High-Temp. Anneal for SiC wafers ... (more) SINGLE WAFER SYSTEMS MARORA -Single Wafer Plasma Nitridation / Oxidation System. MARORA offers the best gate...

CX9600 Series CX9600 Series CX9800 Series The CX9600 series Block Control System is a set of mini-computers developed to regulate operations between of a number of semiconductor... manufacturing systems. The operations regulated include automating an entire production line or con trolling certain systems within the line. The CX9600 series can be connected... with a CIM system through a host computer. Customers have experienced improved temperature ramp-up, reduced cycle times, and easier maintenance control by linking the CX-9600 series...

Optical Alignment System PRODUCTS CMC-300 Optical and Laser Alignment System The CMC-300 System greatly reduces Overhead-Vehicle downtime during robotics teaching operations... for the 300mm Hitachi-Kokusai Vertical Diffusion Furnace. The System allows operators to stand outside of the Kokusai VDF and teach all of the CZ, CX, CS, and CR teach points without... opening the upper cabinet doors which would otherwise interfere with the OHV. One of the most important benefits of the CMC-300 System is the amount of time saved during teaching...

VR300DS 4-Point Resistivity... PRODUCTS VR300DS 4-Point Resistivity Probe System The VR300DS is an automatic system for performing sheet resistivity testing on surface layers... of semiconductor wafers. The system includes a wafer handling stage platform for carrying a semiconductor wafer, and a carriage that accurately positions a test probe. The carriage... the previous VR120S version as shown in the table below: Home Service and Support Training Services Systems QUIXACE QUIXACE BCD QUIXACE BES QUIXACE HTA VERTRON 200mm MARORA Plasma...