, such as Xe atomic data and Sn atomic data for EUV lithography studies. Overview of Models ATBASE generates a comprehensive set of atomic data for all ions of any atomic element. The... ionization structure of stellar winds, and their radiative properties at UV, EUV, and X-ray wavelengths. ...

for EUV lithography. Mg + Al absorption spectrum. Sample ionization distribution. Inner-shell Ka satellite absorption spectrum. *LTE = local thermodynamic equilibrium ...