for anti-stiction or anti-drift applications Coating 1: The coating is ideally suited for bulk-micromachined devices or surface micromachined devices obtained from dry etch-release... stability as coating 1. Coating 3: the coating is ideally suited for silicon based MEMS devices from surface micromachining obtained from aqueous HF release etch. It is optimized...

to commercialize surface coating technologies. MSI is addressing the emerging industry of Biochips and Microelectromechanical Systems (MEMS). For micromachines, MSI's technology provides a low...

that the future of micromachines or microelectromechanical systems (MEMS) is just "around the corner", but this future has proven to be slow in coming. Despite the demonstration of numerous... dominate at length scales < 1mm. A well-known problem in the fabrication of MEMS devices from surface micromachining is stiction, which occurs when surface adhesion forces are higher... to bulk micro-machining, which is less capable and versatile than surface micromachining in terms of device function. Even for devices from bulk-micromachining, in-use stiction is still...